电子级水的技术指标
级 别
指 标 |
EW-I
|
EW-Ⅱ
|
EW-Ⅲ
|
EW-Ⅳ
|
电阻率
MΩ﹒cm(25℃) |
18以上
(95N时间)
不低于17 |
15
(95N时间)
不低于13 |
12.0
|
0.5
|
|
全硅，***大值，µg/L |
2 |
10 |
50 |
1000 |
|
>1µm微粒数，***大值，个/mL |
0.01 |
5 |
10 |
500 |
|
细菌个数，***大值，个/mL |
0.01 |
0.1 |
10 |
100 |
|
铜,***大值，µg /L |
0.2 |
1 |
2 |
500 |
|
锌，***大值，ug/L |
0.2 |
1 |
5 |
500 |
|
镍，***大值．µg/L |
0.1 |
1 |
2 |
500 |
|
钠．***大值，µg /L |
0.5 |
2 |
5 |
1000 |
|
钾，***大值．ug/L |
0.5 |
2 |
5 |
500 |
|
氯，***大值．ug/L |
l |
l |
10 |
1000 |
|
硝酸根，***大值，ug/L |
1 |
1 |
5 |
500 |
|
磷酸根，***大值．ug/L |
1 |
1 |
5 |
500 |
|
硫酸根，***大值, ug/L |
1 |
1 |
5 |
500 |
|
总有机碳，***大值，ug/L |
20 |
100 |
200 |
1000 |
|
|
